長興開發科技股份有限公司

 

Epoch has been a major manufacturer of copper CMP slurry since 1999. Epoch was the first Taiwanese company to produce CMP slurries in high volume for the world market. Today, Epoch continues to provide products to a number of integrated circuit and liquid crystal display manufacturers

CMP copper process  
  
   Copper CMP slurry :
    The EPL2361, EPL2362, EPL3000 series provides optimized 
        removal rates for copper  with low defectivity.
 
   Copper CMP pad cleaning solution :
          EPL8151 effectively activates and cleans the surface of the 
          polishing pad surface during copper processing to extend 
          pad life.
 
   Post CMP cleaning solution:
         EPL8153 provides excellent surface cleansing effect for wafers,
         resulting in a maximum clean surface.

Color filter polish
The EPL301 series offers effective polish performance for the photoresist in the color filter process.

 
Copper slurry with BTA
The EPLB10 series is an effective inhibitor for copper film oxidization.
 
3M CUNO Filter
The 3M CUNO Filter provides precise filtration performance for CMP slurry, DI water and chemicals. Epoch also provides analytical services for related filtration solutions.
 
Specific application
Epoch develops customized solutions for specific applications to satisfy individual customer requirements.
 



If you are interested in obtaining further information on Epoch or Cabot Microelectronics Corporation, please contact the Epoch web master.
E-MAIL: Epoch_service@cabotcmp.com